This paper firstly constructed econometric models reflecting the effects of intra-industry R D, inter-industry R D, international technological spillover to technology progress, technology efficiency and Total Factor Productivity(TFP). Secondly, it counted our industrial indices of technology efficiency, technology progress and Malquist index using Date Enveloped Analysis(DEA) method. Lastly, it estimated the effects of intra-industry R D, inter-industry R D, import and export to the stated indices. The result indicated that domestic intra-industry and inter-industry R D had negative effect to technology efficiency enhancing and had positive effect to technology progress. Intra-industrial R D effected positive contributions to TFP growth, but inter industrial R D had no significant effect on TFP. Both import and export had no significant effect on technology efficiency enhancing and had positive one on technology progress. Import had significant positive contributions on TFP growth, but export had no significant contributions on TFP growth.