Technological progress is a primary factor of industry development,and technological innovation of industry is mainly impetus to drive industry development.So it is necessary to promote industry development and carry out development.We must consider the efficiency of technological innovation in the process of carrying out technological innovation.In this paper,we evaluate efficiency of technological innovation on 29 industries in China by DEA model and analyze these industries from DEA efficiency,return to scale and redundancy of input and output.We conclude that the efficiency of industrial technological innovation is universal low,return to scale is not ideal,the redundancy of input and output is excessive.