Based on the data of national high-tech zones and Chinese cities from 2007 to 2019, the impact of the innovation capacity of "mature" and "growing" high-tech zones on urban total factor productivity has been empirically investigated. The research finds that, on the whole, the improvement of the innovation ability of high-tech zones contributes to the growth of urban TFP. The innovation ability of "mature" high-tech zones inhibits urban TFP, and the innovation ability of "growing" high-tech zones significantly promotes urban TFP. The intermediary effect test shows that the innovation ability of "mature" national high-tech zones has a masking effect on the impact of urban TFP by promoting the upgrading of urban industrial structure; The innovation ability of "growing" High-tech Zone promotes the growth of urban TFP by enhancing the quality of urban labor force. The heterogeneity test shows that the innovation ability of "mature" high-tech zones in the eastern region has a significant negative impact on urban TFP, while the "mature" innovation ability in the central and western regions can significantly promote the improvement of urban TFP. The innovation ability of high-tech zones in cities with different government scales also has different effects on urban TFP.